PI Baking Wafers na Annealing

2024-10-28

N'ime mpaghara nrụpụta semiconductor, usoro usoro ọ bụla dị oke mkpa, na-etolite usoro mmepụta siri ike na nke ziri ezi. PI baking wafers na annealing bụ usoro abụọ dị mkpa na-emetụta arụmọrụ, nkwụsi ike na mkpụrụ nke ngwaahịa ikpeazụ. Usoro ndị a na-emetụta ọ bụghị naanị ogo elu nke wafers kamakwa njirimara eletrik ha dị n'ime ya na ike ọrụ.

PI Baking Wafers

Ebumnuche
PI baking wafers bụ nzọụkwụ dị mkpa dị mkpa na nrụpụta semiconductor, iji wepụ ihe ndị na-emerụ emerụ n'elu wafer na ịmepụta ihe nkiri nchebe kwụsiri ike site na nhazi okpomọkụ dị elu na oven ụlọ ọrụ mmepụta ihe. Ihe nkiri nchebe a, nke a maara dị ka ihe nkiri polyimide (PI), na-ekewapụ wafers nke ọma site na ikuku oxygen na mmiri na ikuku, na-egbochi ikuku oxidation na-enye nchebe ọzọ na usoro ndị na-esote, na-eme ka ịdị ọcha na nkwụsi ike nke wafers.

Usoro
N'oge nkwadebe, a na-etinye wafers ndị a ga-esi na oven na-ekpo ọkụ, a na-emechi ọnụ ụzọ, ma na-arụ ọrụ ọkụ ọkụ. A na-eji nwayọọ nwayọọ na-ebuli okpomọkụ dị n'ime oven. Ozugbo ọ ruru n'elu 200 Celsius, a na-ewebata gas nitrogen dị ọcha iji wepụ oxygen na mmiri mmiri, na-egbochi oxidation nke elu wafer. A na-etinye ihe ngwọta PI nke ọma n'elu wafer na-atụgharị, na-akpụ ihe nkiri dị mkpa. Achịcha a na-aga n'ihu ruo otu oge (na-adịkarị n'etiti nkeji 10 ruo elekere 1) iji gwọọ ihe nkiri PI, hụ na ọ na-agbasosi ike na elu wafer. N'ikpeazụ, mgbe ikpo ọkụ gasịrị, a na-agbanyụ usoro ikpo ọkụ, na-ekwe ka oven ahụ dị jụụ ruo n'ime ụlọ tupu ị wepụ wafers ndị a na-esi nri.

Ụkpụrụ
Ụkpụrụ nke PI baking wafers na-adabere na mmiri ọkụ na mmeghachi omume kemịkalụ, nke na-emebi ihe ndị dị ndụ na adịghị ọcha na ngwọta PI n'ime gas nke nitrogen na-ebupụ, si otú ahụ na-ehichapụ elu wafer. Site n'ịmepụta ebe ikuku oxygen na-enweghị ikuku na nkụ, a na-ekpuchi ihe ngwọta PI n'otu n'otu n'elu wafer na-atụgharị, na-eme ihe nkiri ọbụna. N'okpuru okpomọkụ na-adịgide adịgide na oven ụlọ ọrụ mmepụta ihe, ihe nkiri PI ji nwayọọ nwayọọ gwọọ ma na-agbasosi ike, na-emepụta ihe mgbochi siri ike nke na-echebe elu wafer site na oxidation na mmetọ, na-eme ka nkwụsi ike na ntụkwasị obi dịkwuo elu.

Na-ewe iwe

Ebumnuche
Annealing bụ usoro ọzọ dị oke egwu na nrụpụta semiconductor, nke ezubere iji kwalite microstructure na akụrụngwa anụ ahụ nke wafers site na ọgwụgwọ okpomọkụ. N'ime usoro a, a na-etinye wafers n'ime ọkụ na-ekpo ọkụ ma tinye ya na okpomọkụ dị elu maka oge, na-esote oyi. Nzọụkwụ a dị mkpa maka iwepụ nchekasị fọdụrụnụ n'ime wafers, ịkwalite uto ọka, na ịkwalite akụrụngwa ha na eletriki.

Usoro
N'oge nkwadebe, a na-etinye wafers ndị a na-eme achịcha PI n'ime ọkụ na-ekpo ọkụ, a na-emechi ọnụ ụzọ, ma na-arụ ọrụ ọkụ ọkụ. N'oge ikpo ọkụ na-ekpo ọkụ, okpomọkụ dị na ọkụ ọkụ na-eji nwayọọ nwayọọ na-amụba, na-eme ka ọ dị elu karịa 600 ° C maka oge a kapịrị ọnụ (na-abụkarị nkeji ole na ole ruo ọtụtụ iri nkeji) iji kwe ka mmepe ọka zuru oke na okpomọkụ dị elu. Mgbe kpochara, a na-agbanyụ usoro ahụ, a na-ahapụkwa okpomọkụ dị n'ime ọkụ ahụ ka ọ dị jụụ n'ime ụlọ tupu i wepụ wafers ndị a na-agwọ.

Ụkpụrụ
Ụkpụrụ na-arụ ọrụ nke mgbakasị ahụ dabere na mgbasa ozi atọm na nhazigharị lattice. N'ebe okpomọkụ dị elu, atom ndị dị n'ime wafers na-eme njem siri ike, na-eme ka mgbasa nke atomic na-eduga na uto ọka. N'otu oge ahụ, ọgwụgwọ okpomọkụ dị elu na-ewepụ nrụgide fọdụrụnụ nke ọma, na-eme ka nhazi nke lattice guzosie ike. Usoro a ọ bụghị nanị na-eme ka ihe anụ ahụ nke wafers dịkwuo elu ma na-atọkwa ntọala maka ịkwalite arụmọrụ eletrik ha.

PI baking wafer na annealing bụ usoro abụọ dị mkpa na nrụpụta semiconductor. PI baking wafers na-echebe ịdị ọcha na nkwụsi ike nke elu wafer site na iwepụ ihe ndị na-emerụ emerụ na ịmepụta ihe nkiri nchebe, ebe ịchafụ na-eme ka mma na arụmọrụ zuru oke site na ịkwalite microstructure na ihe anụ ahụ. Usoro abụọ a na-akwado ibe ha ma bụrụ ihe dị mkpa, na-enye nkwado siri ike maka ịdị elu dị elu na arụmọrụ na mmepụta semiconductor.